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Ichiro Sasaki
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for monitoring plasma processing apparatus
Patent number
6,796,269
Issue date
Sep 28, 2004
Hitchi High-Technologies Corporation
Ichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
6,755,935
Issue date
Jun 29, 2004
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing equipment and plasma processing method using the...
Patent number
6,624,084
Issue date
Sep 23, 2003
Hitachi, Ltd.
Kenji Maeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing device and plasma processing method
Patent number
6,427,621
Issue date
Aug 6, 2002
Hitachi, Ltd.
Masato Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
6,422,172
Issue date
Jul 23, 2002
Hitachi, Ltd.
Jyunichi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing system and plasma processing method
Patent number
6,245,190
Issue date
Jun 12, 2001
Hitachi, Ltd.
Toshio Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and processing method
Patent number
5,759,424
Issue date
Jun 2, 1998
Hitachi, Ltd.
Mitsuko Imatake
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for monitoring plasma processing apparatus
Publication number
20050051270
Publication date
Mar 10, 2005
Ichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for monitoring plasma processing apparatus
Publication number
20030102083
Publication date
Jun 5, 2003
Ichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and plasma processing method
Publication number
20030010453
Publication date
Jan 16, 2003
Jyunichi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20010023663
Publication date
Sep 27, 2001
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing equipment and plasma processing method using the...
Publication number
20010022293
Publication date
Sep 20, 2001
Kenji Maeda
H01 - BASIC ELECTRIC ELEMENTS