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Ichiro Yamasaki
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for polishing silicon wafer and polishing liquid therefor
Patent number
8,932,952
Issue date
Jan 13, 2015
Sumco Corporation
Shinichi Ogata
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR POLISHING SILICON WAFER AND POLISHING LIQUID THEREFOR
Publication number
20130032573
Publication date
Feb 7, 2013
SUMCO CORPORATION
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS