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Ichirou Shiono
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Omiya, JP
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last 30 patents
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Patent Grant
Sputtering target for depositing ferroelectric film, method for pre...
Patent number
5,997,704
Issue date
Dec 7, 1999
Mitsubishi Materials Corporation
Ichirou Shiono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...