Ida Ariani Adisaputro

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for etch passivating and etching a substrate
- Patent number 6,489,248
- Issue date Dec 3, 2002
- Applied Materials, Inc.
- Luke Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for etching a substrate with reduced microloading
- Patent number 6,291,357
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Luke Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for etch passivating and etching a substrate
- Publication number 20020019139
- Publication date Feb 14, 2002
- APPLIED MATERIALS, INC.
- Luke Zhang
- H01 - BASIC ELECTRIC ELEMENTS