Igor Fidelman

Follow

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
- Patent number 7,977,258
- Issue date Jul 12, 2011
- Mattson Technology, Inc.
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and system for thermally processing a plurality of wafer-sha...
- Publication number 20080248657
- Publication date Oct 9, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS