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Igor Matheus Petronella AARTS
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Eindhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,264,671
Issue date
Sep 11, 2012
ASML Netherlands B.V.
Igor Matheus Petronella Aarts
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS HAVING A SUBSTRATE SUPPORT WITH OPEN CELL PL...
Publication number
20100271611
Publication date
Oct 28, 2010
ASML NETHERLANDS B.V.
Engelbertus, Antonius, Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090323037
Publication date
Dec 31, 2009
ASML NETHERLANDS B.V.
Igor Matheus Petronella AARTS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090296058
Publication date
Dec 3, 2009
ASML NETHERLANDS B.V.
Daan Maurtis SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY