Igor Matheus Petronella Aarts

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Position measurement using natural frequency vibration of a pattern
- Patent number 8,477,289
- Issue date Jul 2, 2013
- ASML Netherlands B.V.
- Daan Maurtis Slotboom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having a substrate support with open cell pl...
- Patent number 8,400,617
- Issue date Mar 19, 2013
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY