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Leuven, BE
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Patents Grants
last 30 patents
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Patent Grant
UV-assisted stripping of hardened photoresist to create chemical te...
Patent number
11,538,684
Issue date
Dec 27, 2022
Tokyo Electron Limited
Mark H. Somervell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
UV-assisted stripping of hardened photoresist to create chemical te...
Patent number
10,490,402
Issue date
Nov 26, 2019
Tokyo Electron Limited
Mark Somervell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
UV-ASSISTED STRIPPING OF HARDENED PHOTORESIST TO CREATE CHEMICAL TE...
Publication number
20200066509
Publication date
Feb 27, 2020
TOKYO ELECTRON LIMITED
Mark H. Somervell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
UV-Assisted Stripping of Hardened Photoresist to Create Chemical Te...
Publication number
20150064917
Publication date
Mar 5, 2015
TOKYO ELECTRON LIMITED
Mark Somervell
H01 - BASIC ELECTRIC ELEMENTS