Iksu Byun

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Hwaseong-Si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
- Patent number 11,929,239
- Issue date Mar 12, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching at low temperature and plasma etching apparatus
- Patent number 10,818,503
- Issue date Oct 27, 2020
- Samsung Electronics Co., Ltd.
- Cheonkyu Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20220223385
- Publication date Jul 14, 2022
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING AT LOW TEMPERATURE AND PLASMA ETCHING APPARATUS
- Publication number 20190385860
- Publication date Dec 19, 2019
- Samsung Electronics Co., Ltd.
- CHEONKYU LEE
- H01 - BASIC ELECTRIC ELEMENTS