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Ikue Sakuma
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Koshigaya, JP
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last 30 patents
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Patent Grant
Cleaning fluid for semiconductor substrate
Patent number
5,705,089
Issue date
Jan 6, 1998
Mitsubishi Gas Chemical Company, Inc.
Yasuo Sugihara
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...