Ikunao Isomura

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Reference image generation method and pattern inspection method
- Patent number 11,443,419
- Issue date Sep 13, 2022
- NuFlare Technology, Inc.
- Yoshitaka Yasui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and method for detecting false defects
- Patent number 10,578,560
- Issue date Mar 3, 2020
- Nuflare Technology, Inc.
- Hiroteru Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 10,290,094
- Issue date May 14, 2019
- NuFlare Technology, Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask inspection apparatus, mask evaluation method and mask evaluati...
- Patent number 10,026,011
- Issue date Jul 17, 2018
- NuFlare Technology, Inc.
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring apparatus
- Patent number 9,811,896
- Issue date Nov 7, 2017
- NuFlare Technology, Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 9,767,547
- Issue date Sep 19, 2017
- NuFlare Technology, Inc.
- Masaya Takeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 9,728,373
- Issue date Aug 8, 2017
- NuFlare Technology, Inc.
- Nobutaka Kikuiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring apparatus that generates positional deviation distributio...
- Patent number 9,659,361
- Issue date May 23, 2017
- NuFlare Technology, Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask inspection apparatus and mask inspection method
- Patent number 9,626,755
- Issue date Apr 18, 2017
- NuFlare Technology, Inc.
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and pattern inspection apparatus
- Patent number 9,535,015
- Issue date Jan 3, 2017
- NUFLARE TECHNOLOGY, INC.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection system and method
- Patent number 9,235,883
- Issue date Jan 12, 2016
- Nuflare Technology, Inc.
- Takafumi Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 9,230,317
- Issue date Jan 5, 2016
- NuFlare Technology, Inc.
- Yoshitaka Yasui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection system and method
- Patent number 8,861,832
- Issue date Oct 14, 2014
- Nuflare Technology, Inc.
- Takafumi Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 8,442,320
- Issue date May 14, 2013
- Kabushiki Kaisha Toshiba
- Ikunao Isomura
- G01 - MEASURING TESTING
Information Patent Grant
Ultrafine lithography pattern inspection using multi-stage TDI imag...
- Patent number 8,254,663
- Issue date Aug 28, 2012
- Kabushiki Kaisha Toshiba
- Akira Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask-defect inspecting apparatus with movable focusing lens
- Patent number 7,760,349
- Issue date Jul 20, 2010
- Kabushiki Kaisha TOPCON
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Grant
Photomask inspection apparatus comparing optical proximity correcti...
- Patent number 7,664,308
- Issue date Feb 16, 2010
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Die-to-database photomask defect detection using region data to mod...
- Patent number 7,639,863
- Issue date Dec 29, 2009
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Die-to-die photomask defect detection using region data to modify i...
- Patent number 7,630,535
- Issue date Dec 8, 2009
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspecting method
- Patent number 7,590,277
- Issue date Sep 15, 2009
- Kabushiki Kaisha Toshiba
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,551,767
- Issue date Jun 23, 2009
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask defect inspection apparatus
- Patent number 7,551,273
- Issue date Jun 23, 2009
- Kabushiki Kaisha Topcon
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,526,119
- Issue date Apr 28, 2009
- Kabushiki Kaisha Toshiba
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method
- Patent number 7,522,276
- Issue date Apr 21, 2009
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,421,109
- Issue date Sep 2, 2008
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,415,149
- Issue date Aug 19, 2008
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask defect inspection apparatus
- Patent number 7,379,176
- Issue date May 27, 2008
- Kabushiki Kaisha Topcon
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,372,560
- Issue date May 13, 2008
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,359,546
- Issue date Apr 15, 2008
- Kabushiki Kaisha Toshiba
- Shinji Sugihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern data generating apparatus and method for inspecting defects...
- Patent number 6,285,783
- Issue date Sep 4, 2001
- Kabushiki Kaisha Toshiba
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20170352140
- Publication date Dec 7, 2017
- NuFlare Technology, Inc.
- Ikunao ISOMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD
- Publication number 20160042505
- Publication date Feb 11, 2016
- NuFlare Technology, Inc.
- Hideo TSUCHIYA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK INSPECTION APPARATUS, MASK EVALUATION METHOD AND MASK EVALUATI...
- Publication number 20150379707
- Publication date Dec 31, 2015
- NuFlare Technology, Inc.
- Hideo TSUCHIYA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASURING APPARATUS
- Publication number 20150125066
- Publication date May 7, 2015
- NuFlare Technology, Inc.
- Ikunao ISOMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASURING APPARATUS
- Publication number 20150125067
- Publication date May 7, 2015
- NuFlare Technology, Inc.
- Ikunao ISOMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20140307945
- Publication date Oct 16, 2014
- NuFlare Technology, Inc.
- Yoshitaka YASUI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20140294283
- Publication date Oct 2, 2014
- NuFlare Technology, Inc.
- Masaya TAKEDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
- Publication number 20140241611
- Publication date Aug 28, 2014
- NuFlare Technology, Inc.
- Ikunao ISOMURA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM AND METHOD
- Publication number 20130250095
- Publication date Sep 26, 2013
- NuFlare Technology, Inc.
- Takafumi INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION SYSTEM AND METHOD
- Publication number 20130216120
- Publication date Aug 22, 2013
- NuFlare Technology, Inc.
- Takafumi INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20120307043
- Publication date Dec 6, 2012
- NuFlare Technology, Inc.
- Hiroteru AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20120081538
- Publication date Apr 5, 2012
- Kabushiki Kaisha Toshiba
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20110229009
- Publication date Sep 22, 2011
- Advanced Mask Inspection Technology Inc.
- Ikunao ISOMURA
- G01 - MEASURING TESTING
Information Patent Application
ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...
- Publication number 20090238446
- Publication date Sep 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Akira Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mask defect inspection apparatus
- Publication number 20080204723
- Publication date Aug 28, 2008
- Kabushiki Kaisha TOPCON
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20080166054
- Publication date Jul 10, 2008
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD
- Publication number 20080151230
- Publication date Jun 26, 2008
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20070127806
- Publication date Jun 7, 2007
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION APPARATUS, PATTERN INSPECTION METHOD AND PROGRAM
- Publication number 20070071307
- Publication date Mar 29, 2007
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection apparatus, pattern inspection method, and progra...
- Publication number 20070047798
- Publication date Mar 1, 2007
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection apparatus, pattern inspection method, and progra...
- Publication number 20070047799
- Publication date Mar 1, 2007
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspecting method
- Publication number 20060018530
- Publication date Jan 26, 2006
- Kabushiki Kaisha Toshiba
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspection apparatus and defect inspection method
- Publication number 20050232477
- Publication date Oct 20, 2005
- Shinji Sugihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mask defect inspection apparatus
- Publication number 20050213083
- Publication date Sep 29, 2005
- Kabushiki Kaisha TOPCON
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Application
Mask-defect inspecting apparatus
- Publication number 20050213084
- Publication date Sep 29, 2005
- Kabushiki Kaisha TOPCON
- Akihiko Sekine
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040252296
- Publication date Dec 16, 2004
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040126003
- Publication date Jul 1, 2004
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040105578
- Publication date Jun 3, 2004
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING

Ikunao Isomura

Person

Patents Grantslast 30 patents

Reference image generation method and pattern inspection method

Inspection apparatus and method for detecting false defects

Pattern inspection apparatus and pattern inspection method

Mask inspection apparatus, mask evaluation method and mask evaluati...

Measuring apparatus

Inspection method and inspection apparatus

Pattern inspection apparatus and pattern inspection method

Measuring apparatus that generates positional deviation distributio...

Mask inspection apparatus and mask inspection method

Pattern inspection method and pattern inspection apparatus

Inspection system and method

Inspection method and inspection apparatus

Inspection system and method

Pattern inspection apparatus and pattern inspection method

Ultrafine lithography pattern inspection using multi-stage TDI imag...

Mask-defect inspecting apparatus with movable focusing lens

Photomask inspection apparatus comparing optical proximity correcti...

Die-to-database photomask defect detection using region data to mod...

Die-to-die photomask defect detection using region data to modify i...

Pattern inspecting method

Pattern inspection apparatus

Mask defect inspection apparatus

Pattern inspection apparatus

Pattern inspection method

Pattern inspection apparatus

Pattern inspection apparatus

Mask defect inspection apparatus

Pattern inspection apparatus

Defect inspection apparatus and defect inspection method

Pattern data generating apparatus and method for inspecting defects...

Patents Applicationslast 30 patents

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD

MASK INSPECTION APPARATUS, MASK EVALUATION METHOD AND MASK EVALUATI...

MEASURING APPARATUS

MEASURING APPARATUS

INSPECTION METHOD AND INSPECTION APPARATUS

INSPECTION METHOD AND INSPECTION APPARATUS

PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS

INSPECTION SYSTEM AND METHOD

INSPECTION SYSTEM AND METHOD

INSPECTION APPARATUS AND METHOD

PATTERN INSPECTION APPARATUS

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...

Mask defect inspection apparatus

PATTERN INSPECTION APPARATUS

PATTERN INSPECTION METHOD

PATTERN INSPECTION APPARATUS

PATTERN INSPECTION APPARATUS, PATTERN INSPECTION METHOD AND PROGRAM

Pattern inspection apparatus, pattern inspection method, and progra...

Pattern inspection apparatus, pattern inspection method, and progra...

Pattern inspecting method

Defect inspection apparatus and defect inspection method

Mask defect inspection apparatus

Mask-defect inspecting apparatus

Pattern inspection apparatus

Pattern inspection apparatus

Pattern inspection apparatus