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Ikuo HIROSE
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Toyama, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
9,163,309
Issue date
Oct 20, 2015
Hitachi Kokusai Electric, Inc.
Tetsuo Yamamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
Publication number
20150093916
Publication date
Apr 2, 2015
Hitachi Kokusai Electric Inc.
Tetsuo YAMAMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...