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Probe apparatus
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Patent number 9,658,285
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Issue date May 23, 2017
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Tokyo Electron Limited
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Isao Kouno
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G01 - MEASURING TESTING
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Probe card for power device
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Patent number 9,322,844
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Issue date Apr 26, 2016
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Tokyo Electron Limited
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Eiichi Shinohara
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G01 - MEASURING TESTING
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Carrier supporting apparatus
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Patent number 8,678,739
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Issue date Mar 25, 2014
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Tokyo Electron Limited
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Ikuo Ogasawara
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer attracting plate
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Patent number D609652
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Issue date Feb 9, 2010
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Tokyo Electron Limited
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Munetoshi Nagasaka
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D13 - Equipment for production, distribution, or transformation of energy
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Wafer holding member
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Patent number D589912
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Issue date Apr 7, 2009
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Tokyo Electron Limited
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Ikuo Ogasawara
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D13 - Equipment for production, distribution, or transformation of energy
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Wafer holding member
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Patent number D589474
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Issue date Mar 31, 2009
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Tokyo Electron Limited
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Ikuo Ogasawara
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D13 - Equipment for production, distribution, or transformation of energy
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Wafer chuck
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Patent number 7,411,384
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Issue date Aug 12, 2008
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Tokyo Electron Limited
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Ikuo Ogasawara
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G01 - MEASURING TESTING