Ikuo Sunaka

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,869,777
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Fumihiro Kamimura
- B08 - CLEANING
Information Patent Grant
Processing apparatus, abnormality detection method, and storage medium
- Patent number 11,094,568
- Issue date Aug 17, 2021
- Tokyo Electron Limited
- Kenji Nakamizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method and storage medium
- Patent number 10,128,138
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus, substrate processing system, and me...
- Patent number 9,773,690
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of operating substrate proce...
- Patent number 9,696,262
- Issue date Jul 4, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 9,627,238
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate treatment method, and non-tra...
- Patent number 8,707,893
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240096654
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Fumihiro KAMIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210098271
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Fumihiro KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM
- Publication number 20180308730
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Kenji NAKAMIZO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM
- Publication number 20170178935
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...
- Publication number 20160172225
- Publication date Jun 16, 2016
- Tokyo Electron Limited
- Katsuhiro MORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF OPERATING SUBSTRATE PROCE...
- Publication number 20150300960
- Publication date Oct 22, 2015
- Tokyo Electron Limited
- Katsuhiro MORIKAWA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...
- Publication number 20140178162
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND NON-TRA...
- Publication number 20120135148
- Publication date May 31, 2012
- TOKYO ELECTRON LIMITED
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS

Ikuo Sunaka

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Processing apparatus, abnormality detection method, and storage medium

Substrate transfer method and storage medium

Substrate processing apparatus and liquid mixing method

Substrate processing apparatus, substrate processing system, and me...

Substrate processing apparatus, method of operating substrate proce...

Substrate transfer apparatus, substrate transfer method, and storag...

Substrate treatment system, substrate treatment method, and non-tra...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM

SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...

SUBSTRATE PROCESSING APPARATUS, METHOD OF OPERATING SUBSTRATE PROCE...

SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND NON-TRA...