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YONGIN-SI, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Mask inspection apparatuses and methods, and methods of fabricating...
Patent number
11,353,413
Issue date
Jun 7, 2022
Samsung Electronics Co., Ltd.
Hyon-Seok Song
G01 - MEASURING TESTING
Information
Patent Grant
Mask inspection apparatuses and methods, and methods of fabricating...
Patent number
10,955,369
Issue date
Mar 23, 2021
Samsung Electronics Co., Ltd.
Hyon-Seok Song
G01 - MEASURING TESTING
Information
Patent Grant
Phase shift mask
Patent number
10,474,034
Issue date
Nov 12, 2019
Samsung Electronics Co., Ltd.
Il-yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank and phase shift mask using same
Patent number
10,444,619
Issue date
Oct 15, 2019
Samsung Electronics Co., Ltd.
Hye Kyoung Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of generating a pattern on a photomask using a plurality of...
Patent number
9,989,860
Issue date
Jun 5, 2018
Samsung Electronics Co., Ltd.
Sang-Hee Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask and method of forming the same and methods of manufacturi...
Patent number
9,989,857
Issue date
Jun 5, 2018
Samsung Electronics Co., Ltd.
Il-yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift blank photomasks and halftone phase shift phot...
Patent number
8,865,375
Issue date
Oct 21, 2014
Samsung Electronics Co., Ltd.
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomasks and methods of fabricating the same
Patent number
8,592,105
Issue date
Nov 26, 2013
Samsung Electronics Co., Ltd.
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of fabricating halftone phase shift blank photomasks and ha...
Patent number
8,329,363
Issue date
Dec 11, 2012
Samsung Electronics Co., Ltd.
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photo-mask having exposure blocking region and methods of designing...
Patent number
7,560,198
Issue date
Jul 14, 2009
Samsung Electronics Co., Ltd.
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of repairing phase shift mask
Patent number
7,527,901
Issue date
May 5, 2009
Samsung Electronics Co., Ltd.
Jeong-Yun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask blank and method of fabricating a photomask from the same
Patent number
7,371,484
Issue date
May 13, 2008
Samsung Electronics Co., Ltd.
Jeong-yun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MASK INSPECTION APPARATUSES AND METHODS, AND METHODS OF FABRICATING...
Publication number
20210172892
Publication date
Jun 10, 2021
Samsung Electronics Co., Ltd.
HYON-SEOK SONG
G01 - MEASURING TESTING
Information
Patent Application
MASK INSPECTION APPARATUSES AND METHODS, AND METHODS OF FABRICATING...
Publication number
20200150062
Publication date
May 14, 2020
Samsung Electronics Co., Ltd.
HYON-SEOK SONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT MASK
Publication number
20180196348
Publication date
Jul 12, 2018
Samsung Electronics Co., Ltd.
Il-yong JANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK AND PHASE SHIFT MASK USING SAME
Publication number
20180033612
Publication date
Feb 1, 2018
Samsung Electronics Co., Ltd.
Hye Kyoung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A PATTERN ON A PHOTOMASK USING A PLURALITY OF...
Publication number
20170115577
Publication date
Apr 27, 2017
Samsung Electronics Co., Ltd.
SANG-HEE LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK AND METHOD OF FORMING THE SAME AND METHODS OF MANUFACTURI...
Publication number
20160109794
Publication date
Apr 21, 2016
IL-yong JANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone Phase Shift Blank Photomasks and Halftone Phase Shift Phot...
Publication number
20130101926
Publication date
Apr 25, 2013
Samsung Electronics Co., Ltd.
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASKS AND METHODS OF FABRICATING THE SAME
Publication number
20120100465
Publication date
Apr 26, 2012
IL-Yong JANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods of Fabricating Halftone Phase Shift Blank Photomasks and Ha...
Publication number
20110104591
Publication date
May 5, 2011
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photo-mask having exposure blocking region and methods of designing...
Publication number
20060051684
Publication date
Mar 9, 2006
Il-Yong Jang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of repairing phase shift mask
Publication number
20060019178
Publication date
Jan 26, 2006
Jeong-Yun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask blank and method of fabricating a photomask from the same
Publication number
20050042526
Publication date
Feb 24, 2005
Jeong-yun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY