Iliya SIGAL

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Stamford, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, substrate table, and method
- Patent number 11,988,971
- Issue date May 21, 2024
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography supports with defined burltop topography
- Patent number 11,520,241
- Issue date Dec 6, 2022
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Burls with altered surface topography for holding an object in lith...
- Patent number 11,270,906
- Issue date Mar 8, 2022
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
- Publication number 20210202293
- Publication date Jul 1, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY SUPPORTS WITH DEFINED BURLTOP TOPOGRAPHY
- Publication number 20210173312
- Publication date Jun 10, 2021
- ASML Holding N.V.
- Matthew LIPSON
- H01 - BASIC ELECTRIC ELEMENTS