ILWOONG KOO

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North Andover, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for implementing low dose implant in a plasma system
- Patent number 9,783,884
- Issue date Oct 10, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Ilwoong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for clamping and declamping a substrate
- Patent number 9,142,438
- Issue date Sep 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ilwoong Koo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method For Implementing Low Dose Implant In A Plasma System
- Publication number 20140272182
- Publication date Sep 18, 2014
- Ilwoong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR CLAMPING AND DECLAMPING A SUBSTRATE
- Publication number 20140240891
- Publication date Aug 28, 2014
- ILWOONG KOO
- H01 - BASIC ELECTRIC ELEMENTS