Ilya Bezel

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser-sustained plasma source based on colliding liquid jets
- Patent number 12,033,845
- Issue date Jul 9, 2024
- KLA Corporation
- John Szilagyi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Swirler for laser-sustained plasma light source with reverse vortex...
- Patent number 11,978,620
- Issue date May 7, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,921,297
- Issue date Mar 5, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma lamps with graded concentration of hydroxyl...
- Patent number 11,887,835
- Issue date Jan 30, 2024
- KLA Corporation
- Oleg Khodykin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for vacuum ultraviolet lamp assisted ignition of...
- Patent number 11,844,172
- Issue date Dec 12, 2023
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Laser-sustained plasma light source with reverse vortex flow
- Patent number 11,776,804
- Issue date Oct 3, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source with collection...
- Patent number 11,778,720
- Issue date Oct 3, 2023
- KLA Corporation
- Matthew Derstine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source with gas vortex flow
- Patent number 11,690,162
- Issue date Jun 27, 2023
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotating lamp for laser-sustained plasma illumination source
- Patent number 11,596,048
- Issue date Feb 28, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,262,591
- Issue date Mar 1, 2022
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential imaging for single-path optical wafer inspection
- Patent number 11,138,722
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for pumping laser sustained plasma with interlace...
- Patent number 11,121,521
- Issue date Sep 14, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectrometer for vacuum ultraviolet measurements in high-pressure e...
- Patent number 11,035,727
- Issue date Jun 15, 2021
- KLA Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 10,976,025
- Issue date Apr 13, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source
- Patent number 10,887,974
- Issue date Jan 5, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma source with lamp house correction
- Patent number 10,823,943
- Issue date Nov 3, 2020
- KLA Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
High power broadband illumination source
- Patent number 10,806,016
- Issue date Oct 13, 2020
- KLA Corporation
- Oleg Khodykin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Neutral atom imaging system
- Patent number 10,714,307
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma and enhancing...
- Patent number 10,714,327
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
Laser sustained plasma light source with forced flow through natura...
- Patent number 10,690,589
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-power short-pass total internal reflection filter
- Patent number 10,691,024
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Wei Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for imaging a sample with an illumination source...
- Patent number 10,616,987
- Issue date Apr 7, 2020
- KLA-Tencor Corporation
- Wei Zhao
- G02 - OPTICS
Information Patent Grant
System and method for pumping laser sustained plasma with a frequen...
- Patent number 10,568,195
- Issue date Feb 18, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G02 - OPTICS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 10,520,741
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Broadband light source including transparent portion with high hydr...
- Patent number 10,522,340
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Nanocrystal-based light source for sample characterization
- Patent number 10,495,287
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,381,216
- Issue date Aug 13, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser sustained plasma light source with graded absorption features
- Patent number 10,283,342
- Issue date May 7, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for laser-sustained plasma illumination
- Patent number 10,257,918
- Issue date Apr 9, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Grant
System and method for electrodeless plasma ignition in laser-sustai...
- Patent number 10,244,613
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
HIGH-POWER COMPACT VUV LASER-SUSTAINED PLASMA LIGHT SOURCE
- Publication number 20240274430
- Publication date Aug 15, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VUV LASER-SUSTAINED PLASMA LIGHT SOURCE WITH LONG-PASS FILTERING
- Publication number 20240276625
- Publication date Aug 15, 2024
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR VACUUM ULTRAVIOLET LAMP ASSISTED IGNITION OF...
- Publication number 20240138048
- Publication date Apr 25, 2024
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PULSE-ASSISTED LASER-SUSTAINED PLASMA IN FLOWING HIGH-PRESSURE LIQUIDS
- Publication number 20240105440
- Publication date Mar 28, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA SOURCE BASED ON COLLIDING LIQUID JETS
- Publication number 20230335389
- Publication date Oct 19, 2023
- KLA Corporation
- John Szilagyi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LAMPS WITH GRADED CONCENTRATION OF HYDROXYL...
- Publication number 20230046314
- Publication date Feb 16, 2023
- KLA Corporation
- Oleg Khodykin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...
- Publication number 20230053035
- Publication date Feb 16, 2023
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW
- Publication number 20220344146
- Publication date Oct 27, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...
- Publication number 20220187610
- Publication date Jun 16, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW
- Publication number 20210321508
- Publication date Oct 14, 2021
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20210231292
- Publication date Jul 29, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of...
- Publication number 20210120659
- Publication date Apr 22, 2021
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE
- Publication number 20210092826
- Publication date Mar 25, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20210022233
- Publication date Jan 21, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with Interlace...
- Publication number 20200274314
- Publication date Aug 27, 2020
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Differential Imaging For Single-Path Optical Wafer Inspection
- Publication number 20200202504
- Publication date Jun 25, 2020
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with an Illumi...
- Publication number 20200150445
- Publication date May 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Source with Lamp House Correction
- Publication number 20200041774
- Publication date Feb 6, 2020
- KLA-Tencor Corporation
- Shiyu Zhang
- G02 - OPTICS
Information Patent Application
Neutral Atom Imaging System
- Publication number 20190378684
- Publication date Dec 12, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with a Frequen...
- Publication number 20190373709
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma and Enhancing...
- Publication number 20190287785
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spectrometer for Vacuum Ultraviolet Measurements in High-Pressure E...
- Publication number 20190285470
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Application
High-Power Short-Pass Total Internal Reflection Filter
- Publication number 20190235390
- Publication date Aug 1, 2019
- KLA-Tencor Corporation
- Wei Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20190115203
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Broadband Illumination Source
- Publication number 20190037676
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Oleg Khodykin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Sustained Plasma Light Source with Forced Flow Through Natura...
- Publication number 20190033204
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Broadband Light Source Including Transparent Portion with High Hydr...
- Publication number 20180330937
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
System and Method for Inhibiting VUV Radiative Emission of a Laser-...
- Publication number 20170345639
- Publication date Nov 30, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20170315369
- Publication date Nov 2, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Laser-sustained plasma source based on colliding liquid jets

Swirler for laser-sustained plasma light source with reverse vortex...

System and method for pumping laser sustained plasma with an illumi...

Laser-sustained plasma lamps with graded concentration of hydroxyl...

System and method for vacuum ultraviolet lamp assisted ignition of...

Laser-sustained plasma light source with reverse vortex flow

High efficiency laser-sustained plasma light source with collection...

Laser-sustained plasma light source with gas vortex flow

Rotating lamp for laser-sustained plasma illumination source

System and method for pumping laser sustained plasma with an illumi...

Differential imaging for single-path optical wafer inspection

System and method for pumping laser sustained plasma with interlace...

Spectrometer for vacuum ultraviolet measurements in high-pressure e...

Plasma cell for providing VUV filtering in a laser-sustained plasma...

High efficiency laser-sustained plasma light source

Plasma source with lamp house correction

High power broadband illumination source

Neutral atom imaging system

System and method for pumping laser sustained plasma and enhancing...

Laser sustained plasma light source with forced flow through natura...

High-power short-pass total internal reflection filter

System and method for imaging a sample with an illumination source...

System and method for pumping laser sustained plasma with a frequen...

System and method for separation of pump light and collected light...

Broadband light source including transparent portion with high hydr...

Nanocrystal-based light source for sample characterization

Continuous-wave laser-sustained plasma illumination source

Laser sustained plasma light source with graded absorption features

System and method for laser-sustained plasma illumination

System and method for electrodeless plasma ignition in laser-sustai...

Patents Applicationslast 30 patents

HIGH-POWER COMPACT VUV LASER-SUSTAINED PLASMA LIGHT SOURCE

VUV LASER-SUSTAINED PLASMA LIGHT SOURCE WITH LONG-PASS FILTERING

SYSTEM AND METHOD FOR VACUUM ULTRAVIOLET LAMP ASSISTED IGNITION OF...

PULSE-ASSISTED LASER-SUSTAINED PLASMA IN FLOWING HIGH-PRESSURE LIQUIDS

LASER-SUSTAINED PLASMA SOURCE BASED ON COLLIDING LIQUID JETS

LASER-SUSTAINED PLASMA LAMPS WITH GRADED CONCENTRATION OF HYDROXYL...

SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...

LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW

SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...

LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of...

ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE

High Efficiency Laser-Sustained Plasma Light Source

System and Method for Pumping Laser Sustained Plasma with Interlace...

Differential Imaging For Single-Path Optical Wafer Inspection

System and Method for Pumping Laser Sustained Plasma with an Illumi...

Plasma Source with Lamp House Correction

Neutral Atom Imaging System

System and Method for Pumping Laser Sustained Plasma with a Frequen...

System and Method for Pumping Laser Sustained Plasma and Enhancing...

Spectrometer for Vacuum Ultraviolet Measurements in High-Pressure E...

High-Power Short-Pass Total Internal Reflection Filter

Continuous-Wave Laser-Sustained Plasma Illumination Source

High Power Broadband Illumination Source

Laser Sustained Plasma Light Source with Forced Flow Through Natura...

Broadband Light Source Including Transparent Portion with High Hydr...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

System and Method for Inhibiting VUV Radiative Emission of a Laser-...

System and Method for Separation of Pump Light and Collected Light...