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Ilya Chizhov
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Fast wafer positioning method for optical metrology
Patent number
7,030,984
Issue date
Apr 18, 2006
Therma-Wave, Inc.
Martin Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for finding the center of rotation of an R-theta...
Patent number
6,747,746
Issue date
Jun 8, 2004
Therma-Wave, Inc.
Ilya Chizhov
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Fast wafer positioning method for optical metrology
Publication number
20040027572
Publication date
Feb 12, 2004
Martin Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System for providing communication between a GUI and metrology cont...
Publication number
20030093164
Publication date
May 15, 2003
Martin Ebert
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Graphical user interface for sample positioning
Publication number
20030081216
Publication date
May 1, 2003
Martin Ebert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for finding the center of rotation of an R-theta...
Publication number
20030025919
Publication date
Feb 6, 2003
Ilya Chizhov
G01 - MEASURING TESTING