Ilya M. Bystyak

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Swampscott, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductively-coupled torodial plasma source
- Patent number 7,166,816
- Issue date Jan 23, 2007
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inductively-coupled toroidal plasma source
- Patent number 6,815,633
- Issue date Nov 9, 2004
- Applied Science and Technology, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS