Ilya MALAKHOVSKY

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Methods of determining stress in a substrate, control system for co...
- Patent number 11,300,888
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Richard Johannes Franciscus Van Haren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for use in a device manufacturing method
- Patent number 11,226,567
- Issue date Jan 18, 2022
- ASML Netherlands B.V.
- Richard Johannes Franciscus Van Haren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table and lithographic apparatus
- Patent number 10,192,772
- Issue date Jan 29, 2019
- ASML Netherlands B.V.
- Satish Achanta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF DETERMINING STRESS IN A SUBSTRATE, CONTROL SYSTEM FOR CO...
- Publication number 20200050117
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Richard Johannes Franciscus VAN HAREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO...
- Publication number 20190041758
- Publication date Feb 7, 2019
- ASML NETHERLANDS B.V.
- Leon Paul VAN DIJK
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20180308740
- Publication date Oct 25, 2018
- ASML NETHERLANDS B.V.
- Satish ACHANTA
- H01 - BASIC ELECTRIC ELEMENTS