TREA

Ilya Pokidov

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  • Allston, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Extraction electrode system for high current ion implanter
    • Patent number 7,915,597
    • Issue date Mar 29, 2011
    • Axcelis Technologies, Inc.
    • Yongzhang Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion source
    • Patent number 7,435,971
    • Issue date Oct 14, 2008
    • Axcelis Technologies, Inc.
    • Bo H. Vanderberg
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents