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Ilya Pokidov
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Wincester, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
Patent number
12,075,554
Issue date
Aug 27, 2024
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for impedance matching in a power delivery sys...
Patent number
11,956,885
Issue date
Apr 9, 2024
MKS Instruments, Inc.
Ilya Pokidov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
Patent number
11,019,715
Issue date
May 25, 2021
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,940,635
Issue date
Mar 9, 2021
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,071,521
Issue date
Sep 11, 2018
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,991,098
Issue date
Jun 5, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma applicator with improved power uniformity
Patent number
9,653,266
Issue date
May 16, 2017
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,630,142
Issue date
Apr 25, 2017
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR CURRENT SENSING USING EMBEDDED ELECTRODES
Publication number
20240312772
Publication date
Sep 19, 2024
MKS Instruments, Inc.
Chiu-Ying Tai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PLASMA IGNITION IN TOROIDAL PLASMA SOURCES
Publication number
20240284584
Publication date
Aug 22, 2024
MKS Instruments, Inc.
Ilya Pokidov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR IMPEDANCE MATCHING IN A POWER DELIVERY SYS...
Publication number
20240196510
Publication date
Jun 13, 2024
MKS Instruments, Inc.
Ilya Pokidov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR IMPEDANCE MATCHING IN A POWER DELIVERY SYS...
Publication number
20230057795
Publication date
Feb 23, 2023
MKS Instruments, Inc.
Ilya Pokidov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Microwave System for Microwave-Assisted Surface Chemistry Annealing...
Publication number
20220243333
Publication date
Aug 4, 2022
MKS Instruments, Inc.
Mohammad Kamarehi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
Publication number
20210243876
Publication date
Aug 5, 2021
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
Publication number
20200022246
Publication date
Jan 16, 2020
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20180345569
Publication date
Dec 6, 2018
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20180233333
Publication date
Aug 16, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20170213704
Publication date
Jul 27, 2017
MKS Instruments, Inc.
Xing Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20170173846
Publication date
Jun 22, 2017
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
Publication number
20150279626
Publication date
Oct 1, 2015
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
Publication number
20130146225
Publication date
Jun 13, 2013
MKS Instruments, Inc.
Xing Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...