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Ilya Toytman
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Menlo Park, CA, US
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last 30 patents
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Patent Grant
Inspecting high-resolution photolithography masks
Patent number
9,619,878
Issue date
Apr 11, 2017
KLA-Tencor Corporation
Fred Stanke
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
INSPECTING HIGH-RESOLUTION PHOTOLITHOGRAPHY MASKS
Publication number
20140307943
Publication date
Oct 16, 2014
KLA-Tencor Corporation
Fred Stanke
G01 - MEASURING TESTING