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Imtiaz Ahmad
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Goettingen, DE
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last 30 patents
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Patent Grant
Arrangement for the generation of short-wavelength radiation based...
Patent number
7,541,604
Issue date
Jun 2, 2009
XTREME techonolgies GmbH
Sven Goetze
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for generating extreme ultraviolet (EUV) radiation base...
Patent number
6,894,298
Issue date
May 17, 2005
Xtreme technologies GmbH
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the suppression of particle emission in the generat...
Patent number
6,881,971
Issue date
Apr 19, 2005
Xtreme technologies GmbH
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source with high average EUV radiation output
Patent number
6,815,900
Issue date
Nov 9, 2004
Xtreme technologies GbmH
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED...
Publication number
20070114946
Publication date
May 24, 2007
XTREME technologies GmbH;
SVEN GOETZE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation source with high average EUV radiation output
Publication number
20040145292
Publication date
Jul 29, 2004
XTREME technologies GmbH;
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for the suppression of particle emission in the generat...
Publication number
20030190012
Publication date
Oct 9, 2003
XTREME technologies GmbH;
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for generating extreme ultraviolet (EUV) radiation base...
Publication number
20030068012
Publication date
Apr 10, 2003
XTREME technologies GmbH;
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR