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Patents Grantslast 30 patents

Information Patent Grant
Selective etch of high-k dielectric material
- Patent number 8,124,538
- Issue date Feb 28, 2012
- Lam Research Corporation
- In Deog Bae
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE ETCH OF HIGH-K DIELECTRIC MATERIAL
- Publication number 20090258502
- Publication date Oct 15, 2009
- LAM RESEARCH CORPORATION
- In Deog BAE
- H01 - BASIC ELECTRIC ELEMENTS