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Chung Cheong Nam-Do, KR
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Patents Grants
last 30 patents
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Patent Grant
Facility with multi-storied process chamber for cleaning substrates...
Patent number
7,934,513
Issue date
May 3, 2011
Semes Co., Ltd.
Joung-Hyeon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer transfer apparatus
Patent number
7,611,182
Issue date
Nov 3, 2009
Semes Co., Ltd.
Woo-Young Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Facility with Multi-Storied Process Chamber for Cleaning Substrates...
Publication number
20070224820
Publication date
Sep 27, 2007
Joung-Hyeon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer transfer apparatus
Publication number
20060192400
Publication date
Aug 31, 2006
Woo-Young Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for manufacturing semiconductor devices
Publication number
20030211740
Publication date
Nov 13, 2003
In-Ho Bang
H01 - BASIC ELECTRIC ELEMENTS