In-Sun Yi

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply unit and substrate processing system
- Patent number 10,844,491
- Issue date Nov 24, 2020
- Samsung Electronics Co., Ltd.
- Sukjin Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of cleaning the same
- Patent number 10,822,694
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Sukjin Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING THE SAME
- Publication number 20190055647
- Publication date Feb 21, 2019
- Samsung Electronics Co., Ltd.
- Sukjin Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY UNIT AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170121820
- Publication date May 4, 2017
- Samsung Electronics Co., Ltd.
- Sukjin Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20170092480
- Publication date Mar 30, 2017
- Samsung Electronics Co., Ltd.
- In-Sun YI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...