Incheol SONG

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus
- Patent number 11,996,270
- Issue date May 28, 2024
- Samsung Electronics Co., Ltd.
- Eunhee Jeang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Focus ring, chuck assembly for securing a substrate and plasma trea...
- Patent number 11,817,298
- Issue date Nov 14, 2023
- Samsung Electronics Co., Ltd.
- Incheol Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively-coupled plasma substrate processing apparatus includin...
- Patent number 11,450,545
- Issue date Sep 20, 2022
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20220216039
- Publication date Jul 7, 2022
- Samsung Electronics Co., Ltd.
- Eunhee Jeang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, CHUCK ASSEMBLY FOR SECURING A SUBSTRATE AND PLASMA TREA...
- Publication number 20210305021
- Publication date Sep 30, 2021
- Samsung Electronics Co., Ltd.
- Incheol SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVELY-COUPLED PLASMA SUBSTRATE PROCESSING APPARATUS INCLUDIN...
- Publication number 20200335376
- Publication date Oct 22, 2020
- Samsung Electronics Co., Ltd.
- Jongwoo SUN
- H01 - BASIC ELECTRIC ELEMENTS