Ing-Shin Barry Chen

Person

Danbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid monitoring apparatus
- Patent number 10,288,456
- Issue date May 14, 2019
- Entegris, Inc.
- Thomas H. Baum
- G01 - MEASURING TESTING
Information Patent Grant
Fluid monitoring apparatus
- Patent number 9,134,146
- Issue date Sep 15, 2015
- Entegris, Inc.
- Thomas H. Baum
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
- Patent number 8,109,130
- Issue date Feb 7, 2012
- Advanced Technology Materials, Inc.
- Frank Dimeo, Jr.
- G01 - MEASURING TESTING
Information Patent Grant
Feedback control system and method for maintaining constant resista...
- Patent number 7,655,887
- Issue date Feb 2, 2010
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
- Patent number 7,475,588
- Issue date Jan 13, 2009
- Advanced Technology Materials, Inc.
- Frank Dimeo, Jr.
- G01 - MEASURING TESTING
Information Patent Grant
Gas sensor with attenuated drift characteristic
- Patent number 7,370,511
- Issue date May 13, 2008
- MST Technology GmbH
- Ing-Shin Chen
- G01 - MEASURING TESTING
Information Patent Grant
Nickel-coated free-standing silicon carbide structure for sensing f...
- Patent number 7,296,458
- Issue date Nov 20, 2007
- Advanced Technology Materials, Inc.
- Frank Dimeo, Jr.
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
- Patent number 7,296,460
- Issue date Nov 20, 2007
- Advanced Technology Materials, Inc.
- Frank Dimeo, Jr.
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and process for sensing target gas species in semiconduct...
- Patent number 7,228,724
- Issue date Jun 12, 2007
- Advanced Technology Materials, Inc.
- Philip S. H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
Feedback control system and method for maintaining constant resista...
- Patent number 7,193,187
- Issue date Mar 20, 2007
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
- Patent number 7,080,545
- Issue date Jul 25, 2006
- Advanced Technology Materials, Inc.
- Frank Dimeo, Jr.
- G01 - MEASURING TESTING
Information Patent Grant
Barrier structures for integration of high K oxides with Cu and Al...
- Patent number 6,900,498
- Issue date May 31, 2005
- Advanced Technology Materials, Inc.
- Gregory T. Stauf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, B...
- Patent number 6,692,569
- Issue date Feb 17, 2004
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca,...
- Patent number 6,312,816
- Issue date Nov 6, 2001
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
FLUID MONITORING APPARATUS
- Publication number 20160003651
- Publication date Jan 7, 2016
- Entegris, Inc.
- Thomas H. Baum
- G01 - MEASURING TESTING
Information Patent Application
HIGH-K PEROVSKITE MATERIALS AND METHODS OF MAKING AND USING THE SAME
- Publication number 20140134823
- Publication date May 15, 2014
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID MONITORING APPARATUS
- Publication number 20120131990
- Publication date May 31, 2012
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- G01 - MEASURING TESTING
Information Patent Application
FEEDBACK CONTROL SYSTEM AND METHOD FOR MAINTAINING CONSTANT RESISTA...
- Publication number 20100139369
- Publication date Jun 10, 2010
- Advanced Technology Materials, Inc.
- ING-SHIN CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR P...
- Publication number 20090305427
- Publication date Dec 10, 2009
- Advanced Technology Materials, Inc.
- Frank Dimeo, JR.
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Determination of Endpoint of Chamber Cleani...
- Publication number 20080251104
- Publication date Oct 16, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVAL OF NITRIDE DEPOSITS
- Publication number 20080142039
- Publication date Jun 19, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
- Publication number 20080134757
- Publication date Jun 12, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Feedback control system and method for maintaining constant resista...
- Publication number 20060219698
- Publication date Oct 5, 2006
- Ing-Shin Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for monitoring plasma conditions in an etching...
- Publication number 20060211253
- Publication date Sep 21, 2006
- Ing-shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
- Publication number 20050230258
- Publication date Oct 20, 2005
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
- Publication number 20050205424
- Publication date Sep 22, 2005
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
- Publication number 20050199496
- Publication date Sep 15, 2005
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Feedback control system and method for maintaining constant resista...
- Publication number 20050173407
- Publication date Aug 11, 2005
- Ing-Shin Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Chemical sensor responsive to change in volume of material exposed...
- Publication number 20040223884
- Publication date Nov 11, 2004
- Ing-Shin Chen
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and process for sensing target gas species in semiconduct...
- Publication number 20040187557
- Publication date Sep 30, 2004
- Philip S.H. Chen
- G01 - MEASURING TESTING
Information Patent Application
Nickel-coated free-standing silicon carbide structure for sensing f...
- Publication number 20040163444
- Publication date Aug 26, 2004
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
- Publication number 20040163445
- Publication date Aug 26, 2004
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
- Publication number 20040074285
- Publication date Apr 22, 2004
- Frank Dimeo
- G01 - MEASURING TESTING
Information Patent Application
Barrier structures for integration of high K oxides with Cu and AI...
- Publication number 20020167086
- Publication date Nov 14, 2002
- Gregory T. Stauf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A-site-and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, B...
- Publication number 20020117647
- Publication date Aug 29, 2002
- Jeffrey F. Roeder
- C30 - CRYSTAL GROWTH

Ing-Shin Barry Chen

Person

Patents Grantslast 30 patents

Fluid monitoring apparatus

Fluid monitoring apparatus

Apparatus and process for sensing fluoro species in semiconductor p...

Feedback control system and method for maintaining constant resista...

Apparatus and process for sensing fluoro species in semiconductor p...

Gas sensor with attenuated drift characteristic

Nickel-coated free-standing silicon carbide structure for sensing f...

Apparatus and process for sensing fluoro species in semiconductor p...

Apparatus and process for sensing target gas species in semiconduct...

Feedback control system and method for maintaining constant resista...

Apparatus and process for sensing fluoro species in semiconductor p...

Barrier structures for integration of high K oxides with Cu and Al...

A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, B...

A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca,...

Patents Applicationslast 30 patents

FLUID MONITORING APPARATUS

HIGH-K PEROVSKITE MATERIALS AND METHODS OF MAKING AND USING THE SAME

FLUID MONITORING APPARATUS

FEEDBACK CONTROL SYSTEM AND METHOD FOR MAINTAINING CONSTANT RESISTA...

APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR P...

Systems and Methods for Determination of Endpoint of Chamber Cleani...

REMOVAL OF NITRIDE DEPOSITS

Method And Apparatus For Monitoring Plasma Conditions In An Etching...

Feedback control system and method for maintaining constant resista...

Method and apparatus for monitoring plasma conditions in an etching...

Apparatus and process for sensing fluoro species in semiconductor p...

Apparatus and process for sensing fluoro species in semiconductor p...

Apparatus and process for sensing fluoro species in semiconductor p...

Feedback control system and method for maintaining constant resista...

Chemical sensor responsive to change in volume of material exposed...

Apparatus and process for sensing target gas species in semiconduct...

Nickel-coated free-standing silicon carbide structure for sensing f...

Apparatus and process for sensing fluoro species in semiconductor p...

Apparatus and process for sensing fluoro species in semiconductor p...

Barrier structures for integration of high K oxides with Cu and AI...

A-site-and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, B...