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INgmar August KERP
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Vibration isolation system and lithographic apparatus
Patent number
10,545,414
Issue date
Jan 28, 2020
ASML Netherlands B.V.
Alexander Petrus Josephus Van Lankvelt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support device, lithographic apparatus and device manufacturing method
Patent number
9,977,349
Issue date
May 22, 2018
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20180299783
Publication date
Oct 18, 2018
ASML NETHERLANDS B.V.
Alexander Petrus Josephus VAN LANKVELT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160334718
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY