Ingo Dirnstorfer

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 7,002,667
- Issue date Feb 21, 2006
- ASML, Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 6,995,831
- Issue date Feb 7, 2006
- ASML Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20050146699
- Publication date Jul 7, 2005
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20040179184
- Publication date Sep 16, 2004
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY