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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus and method of inspecting wafer
Patent number
12,196,669
Issue date
Jan 14, 2025
Samsung Electronics Co., Ltd.
Martin Priwisch
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor substrate processing apparatus and semiconductor subs...
Patent number
12,165,933
Issue date
Dec 10, 2024
Samsung Electronics Co., Ltd.
Inkeun Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus and inspection method using same
Patent number
11,946,881
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Martin Priwisch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid probe, physical property analysis apparatus including the sa...
Patent number
11,680,898
Issue date
Jun 20, 2023
Samsung Electronics Co., Ltd.
Junbum Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Probe for detecting near field and near-field detecting system incl...
Patent number
11,579,168
Issue date
Feb 14, 2023
Samsung Electronics Co., Ltd.
Ikseon Jeon
G01 - MEASURING TESTING
Information
Patent Grant
Probe for detecting near field and near-field detection system incl...
Patent number
11,579,167
Issue date
Feb 14, 2023
Samsung Electronics Co., Ltd.
Jongmin Yoon
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
MATERIAL MEASUREMENT SYSTEM AND METHOD
Publication number
20250003734
Publication date
Jan 2, 2025
Samsung Electronics Co., Ltd.
Sungyoon Ryu
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF EXTRACTING PROPERTIES OF A LAYER ON A WAFER
Publication number
20240234216
Publication date
Jul 11, 2024
Samsung Electronics Co., Ltd.
Inkeun BAEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TERAHERTZ SIGNAL MEASURING APPARATUS AND MEASURING METHOD
Publication number
20240230528
Publication date
Jul 11, 2024
Samsung Electronics Co., Ltd.
Sunhong Jun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF EXTRACTING PROPERTIES OF A LAYER ON A WAFER
Publication number
20240136232
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Inkeun BAEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROBE AND INSPECTION APPARATUS INCLUDING THE SAME
Publication number
20240019362
Publication date
Jan 18, 2024
Samsung Electronics Co., Ltd.
Junbum Park
G01 - MEASURING TESTING
Information
Patent Application
TERAHERTZ PROBE
Publication number
20230417820
Publication date
Dec 28, 2023
Samsung Electronics Co., Ltd.
Martin Priwisch
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND METHOD OF INSPECTING WAFER
Publication number
20230204503
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Martin Priwisch
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD USING SAME
Publication number
20220412898
Publication date
Dec 29, 2022
Samsung Electronics Co., Ltd.
Martin Priwisch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROBE FOR DETECTING NEAR FIELD AND NEAR-FIELD DETECTING SYSTEM INCL...
Publication number
20220155340
Publication date
May 19, 2022
Samsung Electronics Co., Ltd.
Ikseon Jeon
G01 - MEASURING TESTING
Information
Patent Application
PROBE FOR DETECTING NEAR FIELD AND NEAR-FIELD DETECTION SYSTEM INCL...
Publication number
20220082584
Publication date
Mar 17, 2022
Samsung Electronics Co., Ltd.
Jongmin YOON
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR SUBS...
Publication number
20220037215
Publication date
Feb 3, 2022
Samsung Electronics Co., Ltd.
Inkeun BAEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID PROBE, PHYSICAL PROPERTY ANALYSIS APPARATUS INCLUDING THE SA...
Publication number
20220011225
Publication date
Jan 13, 2022
Samsung Electronics Co., Ltd.
Junbum PARK
G01 - MEASURING TESTING