Inkwang BAE

Follow

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20230043451
- Publication date Feb 9, 2023
- Samsung Electronics Co., Ltd.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS