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InKyo Kim
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Automatic selection of sample values for optical metrology
Patent number
10,895,810
Issue date
Jan 19, 2021
KLA Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Secondary target design for optical measurements
Patent number
9,311,431
Issue date
Apr 12, 2016
KLA-Tencor Corporation
Sungchul Yoo
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY
Publication number
20150142395
Publication date
May 21, 2015
Meng Cao
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
Secondary Target Design for Optical Measurements
Publication number
20130116978
Publication date
May 9, 2013
KLA-TENCOR CORPORATION
Sungchul Yoo
G01 - MEASURING TESTING