Inna Tarshish-Shapir

Person

Haifa, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Verification metrology targets and their design
- Patent number 11,874,605
- Issue date Jan 16, 2024
- KLA Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Field-to-field corrections using overlay targets
- Patent number 11,467,503
- Issue date Oct 11, 2022
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology targets and methods with oblique periodic structures
- Patent number 11,137,692
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Field-to-field corrections using overlay targets
- Patent number 10,990,022
- Issue date Apr 27, 2021
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Verification metrology target and their design
- Patent number 10,705,434
- Issue date Jul 7, 2020
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method, system, and user interface for metrology target characteriz...
- Patent number 10,242,290
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Inna Tarshish-Shapir
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITE OVERLAY METROLOGY TARGET
- Publication number 20210240089
- Publication date Aug 5, 2021
- KLA Corporation
- Anna Golotsvan
- G01 - MEASURING TESTING
Information Patent Application
FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS
- Publication number 20210200105
- Publication date Jul 1, 2021
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Verification Metrology Targets and Their Design
- Publication number 20200348604
- Publication date Nov 5, 2020
- KLA Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Field-to-Field Corrections Using Overlay Targets
- Publication number 20200201193
- Publication date Jun 25, 2020
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY TARGETS AND METHODS WITH OBLIQUE PERIODIC STRUCTURES
- Publication number 20200124982
- Publication date Apr 23, 2020
- KLA-TENCOR CORPORATION
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VERIFICATION METROLOGY TARGETS AND THEIR DESIGN
- Publication number 20170060001
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY TARGET CHARACTERIZATION
- Publication number 20140136137
- Publication date May 15, 2014
- KLA-Tencor Corporation
- Inna Tarshish-Shapir
- G01 - MEASURING TESTING

Inna Tarshish-Shapir

Person

Patents Grantslast 30 patents

Verification metrology targets and their design

Field-to-field corrections using overlay targets

Metrology targets and methods with oblique periodic structures

Field-to-field corrections using overlay targets

Verification metrology target and their design

Method, system, and user interface for metrology target characteriz...

Patents Applicationslast 30 patents

COMPOSITE OVERLAY METROLOGY TARGET

FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS

Verification Metrology Targets and Their Design

Field-to-Field Corrections Using Overlay Targets

METROLOGY TARGETS AND METHODS WITH OBLIQUE PERIODIC STRUCTURES

VERIFICATION METROLOGY TARGETS AND THEIR DESIGN

METROLOGY TARGET CHARACTERIZATION