Iouri Mikliev

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Tschelljabinsk, RU

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Patents Applicationslast 30 patents

Information Patent Application
Method for the production of photoresist structures
- Publication number 20060154178
- Publication date Jul 13, 2006
- FORSCHUNGSZENTRUM KARLSRUHE GMBH
- Daniel Meisel
- G02 - OPTICS