Iraj Eric Shahvandi

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Round Rock, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing particles from a semiconductor processing tool
- Patent number 6,786,222
- Issue date Sep 7, 2004
- Motorola, Inc.
- Larry E. Frisa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition (CVD) method to fill a tr...
- Patent number 6,362,098
- Issue date Mar 26, 2002
- Motorola, Inc.
- Terry Alan Breeden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching process
- Patent number 5,405,491
- Issue date Apr 11, 1995
- Motorola Inc.
- Iraj E. Shahvandi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for forming a sputter deposited metal film
- Patent number 5,358,615
- Issue date Oct 25, 1994
- Motorola, Inc.
- Leroy Grant
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for removing particles from a semiconductor processing tool
- Publication number 20040079385
- Publication date Apr 29, 2004
- Larry E. Frisa
- B08 - CLEANING
Information Patent Application
Method for depositing barrier layers in an opening
- Publication number 20030203615
- Publication date Oct 30, 2003
- Dean J. Denning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer handling device and method for testing wafers
- Publication number 20030082031
- Publication date May 1, 2003
- Olivier Vatel
- G01 - MEASURING TESTING