Iraj Hakimelahy

Follow

Person

Scotts Valley, CA, US

People

Patents Applicationslast 30 patents

Information Patent Application
Protective shield and system for gas distribution
- Publication number 20030061991
- Publication date Apr 3, 2003
- ASML US, Inc.
- Colby Mattson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...