Irene A. Chou

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal management of inductively coupled plasma reactors
- Patent number 7,811,411
- Issue date Oct 12, 2010
- Applied Materials, Inc.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-piece dome with separate RF coils for inductively coupled plasm...
- Patent number 7,651,587
- Issue date Jan 26, 2010
- Applied Materials, Inc.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Chemical treatment to reduce machining-induced sub-surface damage i...
- Publication number 20090142247
- Publication date Jun 4, 2009
- APPLIED MATERIALS, INC.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH PROTECTIVE LAYER FOR PLASMA RESISTANCE
- Publication number 20080029032
- Publication date Feb 7, 2008
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-piece dome with separate RF coils for inductively coupled plasm...
- Publication number 20070037397
- Publication date Feb 15, 2007
- Applied Materials, Inc.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal management of inductively coupled plasma reactors
- Publication number 20070034153
- Publication date Feb 15, 2007
- Applied Materials, Inc.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and systems for increasing substrate temperature in plasma...
- Publication number 20070029046
- Publication date Feb 8, 2007
- Applied Materials, Inc.
- Shijian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetic-field concentration in inductively coupled plasma reactors
- Publication number 20060075967
- Publication date Apr 13, 2006
- Applied Materials, Inc.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anti-clogging nozzle for semiconductor processing
- Publication number 20050218115
- Publication date Oct 6, 2005
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Irene A. Chou

Person

Patents Grantslast 30 patents

Thermal management of inductively coupled plasma reactors

Two-piece dome with separate RF coils for inductively coupled plasm...

Patents Applicationslast 30 patents

Chemical treatment to reduce machining-induced sub-surface damage i...

SUBSTRATE SUPPORT WITH PROTECTIVE LAYER FOR PLASMA RESISTANCE

Two-piece dome with separate RF coils for inductively coupled plasm...

Thermal management of inductively coupled plasma reactors

Methods and systems for increasing substrate temperature in plasma...

Magnetic-field concentration in inductively coupled plasma reactors

Anti-clogging nozzle for semiconductor processing