Irina I. Pozhinskaya

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Fairfield, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Catadioptric optical system for scatterometry
- Patent number 8,107,173
- Issue date Jan 31, 2012
- ASML Holding N.V.
- Yevgeniy Konstanitinovich Shmarev
- G01 - MEASURING TESTING
Information Patent Grant
Catadioptric optical system for scatterometry
- Patent number 7,633,689
- Issue date Dec 15, 2009
- ASML Holding N.V.
- Yevgeniy Konstantinovich Shmarev
- G01 - MEASURING TESTING
Information Patent Grant
Large field of view 2X magnification projection optical system for...
- Patent number 7,405,802
- Issue date Jul 29, 2008
- ASML Holding N.V.
- Robert D. Harned
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Catadioptric Optical System for Scatterometry
- Publication number 20100046092
- Publication date Feb 25, 2010
- ASML Holding N.V.
- Yevgeniy Konstantinovich Shmarev
- G02 - OPTICS
Information Patent Application
Catadioptric Optical System for Scatterometry
- Publication number 20090021845
- Publication date Jan 22, 2009
- ASML Holding N.V.
- Yevgeniy Konstantinovich Shmarev
- G02 - OPTICS
Information Patent Application
Large field of view 2X magnification projection optical system for...
- Publication number 20050237505
- Publication date Oct 27, 2005
- ASML Holding N.V.
- Robert D. Harned
- G02 - OPTICS