Irina Lyulina

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 11,940,740
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 11,385,550
- Issue date Jul 12, 2022
- ASML Netherlands B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 10,642,162
- Issue date May 5, 2020
- ASML Netherlands B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,474,045
- Issue date Nov 12, 2019
- ASML Netherlands B.V.
- Franciscus Godefridus Casper Bijnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 10,274,834
- Issue date Apr 30, 2019
- ASML Netherlands B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 9,946,165
- Issue date Apr 17, 2018
- ASML Netherlands B.V.
- Alexander Ypma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Deformation pattern recognition method, pattern transferring method...
- Patent number 9,753,377
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to determine the usefulness of alignment marks to correct ov...
- Patent number 9,454,084
- Issue date Sep 27, 2016
- ASML Netherlands B.V.
- Irina Lyulina
- G01 - MEASURING TESTING
Information Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
- Patent number 9,291,916
- Issue date Mar 22, 2016
- ASML Netherlands B.V.
- Stefan Cornelis Theodorus Van Der Sanden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark deformation estimating method, substrate position pr...
- Patent number 8,982,347
- Issue date Mar 17, 2015
- ASML Netherlands B.V.
- Xiuhong Wei
- G01 - MEASURING TESTING
Information Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
- Patent number 8,976,355
- Issue date Mar 10, 2015
- ASML Netherlands B.V.
- Stefan Cornelis Theodorus Van Der Sanden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
- Publication number 20240019788
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
- Publication number 20220326623
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...
- Publication number 20200264520
- Publication date Aug 20, 2020
- ASML NETHERLANDS B.V.
- Alexander YPMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
- Publication number 20190278188
- Publication date Sep 12, 2019
- ASML NETHERLANDS B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
- Publication number 20180253015
- Publication date Sep 6, 2018
- ASML NETHERLANDS B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
- Publication number 20160246185
- Publication date Aug 25, 2016
- ASML NETHERLANDS B.V.
- Alexander Ypma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...
- Publication number 20150205213
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
- Publication number 20150153656
- Publication date Jun 4, 2015
- ASML NETHERLANDS B.V.
- Stefan Cornelis Theodorus VAN DER SANDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO DETERMINE THE USEFULNESS OF ALIGNMENT MARKS TO CORRECT OV...
- Publication number 20150146188
- Publication date May 28, 2015
- ASML NETHERLANDS B.V.
- Irina Lyulina
- G01 - MEASURING TESTING
Information Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
- Publication number 20130230797
- Publication date Sep 5, 2013
- ASML NETHERLANDS B.V.
- Stefan Cornelis Theodorus VAN DER SANDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Mark Deformation Estimating Method, Substrate Position Pr...
- Publication number 20130141723
- Publication date Jun 6, 2013
- ASML Netherlands N.V.
- Xiuhong WEI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPH...
- Publication number 20120218533
- Publication date Aug 30, 2012
- ASML NETHERLANDS B.V.
- Irina LYULINA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Irina Lyulina

Person

Patents Grantslast 30 patents

Methods and apparatus for obtaining diagnostic information relating...

Methods and apparatus for obtaining diagnostic information relating...

Methods and apparatus for obtaining diagnostic information relating...

Lithographic apparatus and device manufacturing method

Methods and apparatus for obtaining diagnostic information relating...

Methods and apparatus for obtaining diagnostic information relating...

Deformation pattern recognition method, pattern transferring method...

Method to determine the usefulness of alignment marks to correct ov...

Method of applying a pattern to a substrate, device manufacturing m...

Alignment mark deformation estimating method, substrate position pr...

Method of applying a pattern to a substrate, device manufacturing m...

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...

METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...

METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...

METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...

METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...

METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...

DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...

Method of Applying a Pattern to a Substrate, Device Manufacturing M...

METHOD TO DETERMINE THE USEFULNESS OF ALIGNMENT MARKS TO CORRECT OV...

Method of Applying a Pattern to a Substrate, Device Manufacturing M...

Alignment Mark Deformation Estimating Method, Substrate Position Pr...

METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPH...