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Irit TZEMAH
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Norwalk, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Alignment sensor apparatus for process sensitivity compensation
Patent number
11,175,593
Issue date
Nov 16, 2021
ASML Netherlands B.V.
Simon Reinald Huisman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic cluster, lithographic apparatus, and device manufactur...
Patent number
10,895,813
Issue date
Jan 19, 2021
ASML Holding N.V.
Irit Tzemah
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system wafer stack beam analyzer
Patent number
10,488,767
Issue date
Nov 26, 2019
ASML Holding N.V.
Krishanu Shome
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Alignment Sensor Apparatus for Process Sensivity Compensation
Publication number
20210132509
Publication date
May 6, 2021
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Cluster, Lithographic Apparatus, and Device Manufactur...
Publication number
20200326640
Publication date
Oct 15, 2020
ASML Holding N.V.
Irit TZEMAH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment System Wafer Stack Beam Analyzer
Publication number
20190204759
Publication date
Jul 4, 2019
ASML Holding N.V.
Krishanu SHOME
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY