Isaac Millan

Person

Anaheim, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor with a multiple zone thermal control feed forward co...
- Patent number 8,980,044
- Issue date Mar 17, 2015
- BE Aerospace, Inc.
- Paul Lukas Brillhart
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of cooling a wafer support at a uniform temperature in a cap...
- Patent number 8,801,893
- Issue date Aug 12, 2014
- BE Aerospace, Inc.
- Paul Lukas Brillhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a workpiece in a plasma reactor using multiple...
- Patent number 8,546,267
- Issue date Oct 1, 2013
- B/E Aerospace, Inc.
- Paul Lukas Brillhart
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Capacitively coupled plasma reactor having very agile wafer tempera...
- Patent number 8,337,660
- Issue date Dec 25, 2012
- B/E Aerospace, Inc.
- Douglas A. Buchberger, Jr.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a workpiece in a plasma reactor using feed for...
- Patent number 8,329,586
- Issue date Dec 11, 2012
- Applied Materials, Inc.
- Douglas A. Buchberger, Jr.
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma reactor with wafer backside thermal loop, two-phase internal...
- Patent number 8,221,580
- Issue date Jul 17, 2012
- Applied Materials, Inc.
- Douglas A. Buchberger, Jr.
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma reactor with feed forward thermal control system using a the...
- Patent number 8,092,639
- Issue date Jan 10, 2012
- Advanced Thermal Sciences Corporation
- Douglas A. Buchberger, Jr.
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of operating a capacitively coupled plasma reactor with dual...
- Patent number 7,988,872
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- Paul Lukas Brillhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal control system and method
- Patent number 7,765,820
- Issue date Aug 3, 2010
- Advanced Thermal Sciences, Corp.
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Thermal control system and method
- Patent number 7,415,835
- Issue date Aug 26, 2008
- Advanced Thermal Sciences Corp.
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Thermal control system and method
- Patent number 7,178,353
- Issue date Feb 20, 2007
- Advanced Thermal Sciences Corp.
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...

Patents Applicationslast 30 patents

Information Patent Application
Thermal control system and method
- Publication number 20080319587
- Publication date Dec 25, 2008
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Thermal control system and method
- Publication number 20070169491
- Publication date Jul 26, 2007
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Thermal control system and method
- Publication number 20050183432
- Publication date Aug 25, 2005
- Kenneth W. Cowans
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...

Isaac Millan

Person

Patents Grantslast 30 patents

Plasma reactor with a multiple zone thermal control feed forward co...

Method of cooling a wafer support at a uniform temperature in a cap...

Method of processing a workpiece in a plasma reactor using multiple...

Capacitively coupled plasma reactor having very agile wafer tempera...

Method of processing a workpiece in a plasma reactor using feed for...

Plasma reactor with wafer backside thermal loop, two-phase internal...

Plasma reactor with feed forward thermal control system using a the...

Method of operating a capacitively coupled plasma reactor with dual...

Thermal control system and method

Thermal control system and method

Thermal control system and method

Patents Applicationslast 30 patents

Thermal control system and method

Thermal control system and method

Thermal control system and method