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Vibrating mirror element
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Patent number 8,867,114
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Issue date Oct 21, 2014
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Funai Electric Co., Ltd.
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Isaku Kanno
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G02 - OPTICS
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Vibrating mirror element
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Patent number 8,482,832
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Issue date Jul 9, 2013
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Funai Electric Co., Ltd.
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Hidetoshi Kotera
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G02 - OPTICS
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Vibrating mirror element
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Patent number 8,416,484
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Issue date Apr 9, 2013
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Funai Electric Co., Ltd.
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Isaku Kanno
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G02 - OPTICS
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Vibrating mirror element
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Patent number 8,098,415
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Issue date Jan 17, 2012
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Funai Electric Co., Ltd.
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Isaku Kanno
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B81 - MICRO-STRUCTURAL TECHNOLOGY