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Isamu Gotou
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Nagasaki, JP
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last 30 patents
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Patent Grant
Semiconductor wafer processing method and apparatus
Patent number
8,334,222
Issue date
Dec 18, 2012
Sumco Techxiv Corporation
Isamu Gotou
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SEMICONDUCTOR WAFER PROCESSING METHOD AND APPARATUS
Publication number
20090275213
Publication date
Nov 5, 2009
Sumco Techxiv Corporation
Isamu Gotou
H01 - BASIC ELECTRIC ELEMENTS