Isamu Miyamoto

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 11,018,035
- Issue date May 25, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method of substrate process...
- Patent number 11,011,436
- Issue date May 18, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and processing method of substrate p...
- Patent number 10,217,628
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Yoshifumi Amano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management method of substrate processing apparatus and substrate p...
- Patent number 10,128,137
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20210365054
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Mikio NAKASHIMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210257236
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20190043742
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE P...
- Publication number 20170287703
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESS...
- Publication number 20170287704
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGEMENT METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE P...
- Publication number 20170287750
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS