Isamu Seto

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and device production method
- Patent number 8,624,205
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Isamu Seto
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIU...
- Publication number 20150044615
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND DEVICE PRODUCTION METHOD
- Publication number 20100178602
- Publication date Jul 15, 2010
- Canon Kabushiki Kaisha
- Isamu Seto
- B82 - NANO-TECHNOLOGY