Isamu Shibuya

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Device for treatment of a substrate
- Patent number 6,318,538
- Issue date Nov 20, 2001
- Ushiodenki Kabushiki Kaisha
- Isamu Shibuya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for exposing a peripheral area of a wafer and a device for...
- Patent number 5,929,976
- Issue date Jul 27, 1999
- Ushiodenki Kabushiki Kaisha
- Isamu Shibuya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY