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Isao Gunji

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 12,205,799
    • Issue date Jan 21, 2025
    • Tokyo Electron Limited
    • Isao Gunji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method and plasma processing apparatus
    • Patent number 11,842,886
    • Issue date Dec 12, 2023
    • Tokyo Electron Limited
    • Taro Ikeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry cleaning method of substrate processing apparatus
    • Patent number 8,562,751
    • Issue date Oct 22, 2013
    • Tokyo Electron Limited
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 8,551,565
    • Issue date Oct 8, 2013
    • Tokyo Electron Limited
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,419,856
    • Issue date Apr 16, 2013
    • Tokyo Electron Limited
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method and substrate processing apparatus
    • Patent number 8,124,168
    • Issue date Feb 28, 2012
    • Tokyo Electron Limited
    • Kunihiro Tada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation method and apparatus
    • Patent number 8,029,856
    • Issue date Oct 4, 2011
    • Tokyo Electron Limited
    • Hidenori Miyoshi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD film forming method
    • Patent number 7,582,544
    • Issue date Sep 1, 2009
    • Tokyo Electron Limited
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE
    • Publication number 20230178339
    • Publication date Jun 8, 2023
    • TOKYO ELECTRON LIMITED
    • Kenta KATO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230178340
    • Publication date Jun 8, 2023
    • TOKYO ELECTRON LIMITED
    • Isao GUNJI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING SYSTEM
    • Publication number 20230131213
    • Publication date Apr 27, 2023
    • TOKYO ELECTRON LIMITED
    • Isao GUNJI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20210111003
    • Publication date Apr 15, 2021
    • TOKYO ELECTRON LIMITED
    • Taro IKEDA
    • B08 - CLEANING
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
    • Publication number 20150001588
    • Publication date Jan 1, 2015
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING APPARATUS AND METHOD FOR PROCESSING METAL FILM
    • Publication number 20130306597
    • Publication date Nov 21, 2013
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20120279452
    • Publication date Nov 8, 2012
    • TOKYO ELECTRON LIMITED
    • Isao GUNJI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DRY CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS
    • Publication number 20120180811
    • Publication date Jul 19, 2012
    • Central Glass Company, Limited
    • Isao GUNJI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20100316799
    • Publication date Dec 16, 2010
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD FILM FORMING APPARATUS
    • Publication number 20100064972
    • Publication date Mar 18, 2010
    • TOKYO ELECTRON LIMITED
    • Hideaki YAMASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND APPARATUS
    • Publication number 20090283038
    • Publication date Nov 19, 2009
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND APPARATUS
    • Publication number 20080000416
    • Publication date Jan 3, 2008
    • TOKYO ELECTRON LIMITED
    • Hidenori Miyoshi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Method and Substrate Processing Apparatus
    • Publication number 20070292598
    • Publication date Dec 20, 2007
    • TOKYO ELECTRON LIMITED
    • Kunihiro Tada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND APPARATUS
    • Publication number 20070134919
    • Publication date Jun 14, 2007
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing device and processing method
    • Publication number 20060096531
    • Publication date May 11, 2006
    • TOKYO ELECTRON LIMITED
    • Tadahiro Ishizaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing device and processing method
    • Publication number 20050211167
    • Publication date Sep 29, 2005
    • TOKYO ELECTRON LIMITED
    • Isao Gunji
    • C30 - CRYSTAL GROWTH